NOT KNOWN FACTUAL STATEMENTS ABOUT HOW ENERGY IS DISTRIBUTED

In FIG. 1B, the plasma-cleaning system 150 is revealed beneath the chamber 113, While other positions may possibly alternatively be utilised, by way of example over chamber 113 as described in U.S. software Ser. No. ten/963030, the complete disclosure of which has been Beforehand included herein by reference. In this particular alternate embodiment